مؤتمر
Effects of H/sub 2/ addition in magnetized inductively coupled C/sub 2/F/sub 6/ plasma etching of silica aerogel film
| العنوان: | Effects of H/sub 2/ addition in magnetized inductively coupled C/sub 2/F/sub 6/ plasma etching of silica aerogel film |
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| المؤلفون: | Seok-Joo Wang, Hyung-Ho Park, Sang-Hoon Hyun, Geun-Young Yeom |
| المصدر: | Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) Microprocesses and nanotechnology 2000 Microprocesses and Nanotechnology Conference, 2000 International. :206-207 2000 |
| Relation: | Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 4891140046 9784891140045 |
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| DOI: | 10.1109/IMNC.2000.872712 |