دورية أكاديمية
High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
العنوان: | High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film |
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المؤلفون: | Kusano, Y., Ishii, I., Kamiya, T., Teshigahara, A., Luo, G., Horsley, D.A. |
المصدر: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 66(9):1488-1496 Sep, 2019 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 08853010 15258955 |
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DOI: | 10.1109/TUFFC.2019.2921983 |