دورية أكاديمية

High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

التفاصيل البيبلوغرافية
العنوان: High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
المؤلفون: Kusano, Y., Ishii, I., Kamiya, T., Teshigahara, A., Luo, G., Horsley, D.A.
المصدر: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 66(9):1488-1496 Sep, 2019
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:08853010
15258955
DOI:10.1109/TUFFC.2019.2921983