Evaluation of Au-Au bonding after annealing for getter activation -Fabrication of all-sapphire Cs gas cell for miniature atomic clock-

التفاصيل البيبلوغرافية
العنوان: Evaluation of Au-Au bonding after annealing for getter activation -Fabrication of all-sapphire Cs gas cell for miniature atomic clock-
المؤلفون: Kurashima, Y., Matsumae, T., Yanagimachi, S., Harasaka, K., Takagi, H.
المصدر: 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2019 6th International Workshop on. :78-78 May, 2019
Relation: 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784904743072
DOI:10.23919/LTB-3D.2019.8735309