مؤتمر
Impact of SiON tunnel layer composition on 3D NAND cell performance
| العنوان: | Impact of SiON tunnel layer composition on 3D NAND cell performance |
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| المؤلفون: | Breuil, L., Nyns, L., Banerjee, K., Palayam, S. Vadakupudhu, Subirats, A., Richard, O., Conard, T., Van den Bosch, G., Furnemont, A. |
| المصدر: | 2019 IEEE 11th International Memory Workshop (IMW) Memory Workshop (IMW), 2019 IEEE 11th International. :1-4 May, 2019 |
| Relation: | 2019 IEEE 11th International Memory Workshop (IMW) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728109817 9781728109800 |
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| تدمد: | 25737503 |
| DOI: | 10.1109/IMW.2019.8739714 |