Breaking the Theoretical Limit of 6.5 kV-Class 4H-SiC Super-Junction (SJ) MOSFETs by Trench-Filling Epitaxial Growth

التفاصيل البيبلوغرافية
العنوان: Breaking the Theoretical Limit of 6.5 kV-Class 4H-SiC Super-Junction (SJ) MOSFETs by Trench-Filling Epitaxial Growth
المؤلفون: Kosugi, Ryoji, Ji, Shiyang, Mochizuki, Kazuhiro, Adachi, Kohei, Segawa, Satoshi, Kawada, Yasuyuki, Yonezawa, Yoshiyuki, Okumura, Hajime
المصدر: 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD) Power Semiconductor Devices and ICs (ISPSD), 2019 31st International Symposium on. :39-42 May, 2019
Relation: 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728105802
9781728105819
9781728105796
تدمد:19460201
DOI:10.1109/ISPSD.2019.8757632