دورية أكاديمية
Incorporating Virtual Metrology Into Failure Prediction
| العنوان: | Incorporating Virtual Metrology Into Failure Prediction |
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| المؤلفون: | Kang, S., An, D., Rim, J. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 32(4):553-558 Nov, 2019 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2019.2932377 |