A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors

التفاصيل البيبلوغرافية
العنوان: A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors
المؤلفون: Chang, Wenhan, Li, Zhe, Cheng, Shengzhan, Sun, Shoule, Gao, Chengchen, Hao, Yilong
المصدر: 2019 International Conference on IC Design and Technology (ICICDT) IC Design and Technology (ICICDT), 2019 International Conference on. :1-4 Jun, 2019
Relation: 2019 International Conference on IC Design and Technology (ICICDT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728118536
DOI:10.1109/ICICDT.2019.8790911