التفاصيل البيبلوغرافية
العنوان: |
Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering |
المؤلفون: |
Le Quere, Etienne, Dauzere-Peres, Stephane, Astie, Stephane, Maufront, Cedric, Michallet, Xavier, Bugnon, Guillaume, Ferrandini, Nicolas |
المصدر: |
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2019 30th Annual SEMI. :1-5 May, 2019 |
Relation: |
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |