مؤتمر
Impact of Carbon on the Deactivation Behaviors of Boron and Phosphorus in Preamorphized Silicon
| العنوان: | Impact of Carbon on the Deactivation Behaviors of Boron and Phosphorus in Preamorphized Silicon |
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| المؤلفون: | Chang, Ruey-Dar, Liao, Hsueh-Chun, Lin, Jui-Chang, Tsai, Jung-Ruey |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :86-89 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538668283 9781538668290 9781538668276 |
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| DOI: | 10.1109/IIT.2018.8807894 |