مؤتمر
Evaluation of Ion Angle Deviation Caused by Outgassing during Ion Implantation
| العنوان: | Evaluation of Ion Angle Deviation Caused by Outgassing during Ion Implantation |
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| المؤلفون: | Kawatsu, Sho, Ninomiya, Aki, Watanabe, Kazuhiro, Sugitani, Michiro, kawasaki, yoji, Kabasawa, Mitsuaki |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :303-306 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538668283 9781538668290 9781538668276 |
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| DOI: | 10.1109/IIT.2018.8807922 |