مؤتمر
Characterization of Heated Ion Implantation for non Amorphizing Conditions and Correlation with Kinetic Monte Carlo Simulations
| العنوان: | Characterization of Heated Ion Implantation for non Amorphizing Conditions and Correlation with Kinetic Monte Carlo Simulations |
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| المؤلفون: | Joblot, Sylvain, Duru, Romain, Guitard, Nicolas, Lu, Vincent, Nassiet, Thomas, Beneyton, Remi, Cristiano, Fuccio, Dabertrand, Karen, Borrel, Julien, Juhel, Marc, Arevalo, Edwin, Monsieur, Frederic, Borowiak, Celine, Ghegin, Elodie, Clement, Laurent, Oudot, Evan, Rideau, Denis, Zou, Wei, Pinzelli, Luc |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :121-124 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538668283 9781538668290 9781538668276 |
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| DOI: | 10.1109/IIT.2018.8807957 |