مؤتمر
Prevention of Temperature-Induced Dewetting of Implanted SOI via Heated Ion Implantation
| العنوان: | Prevention of Temperature-Induced Dewetting of Implanted SOI via Heated Ion Implantation |
|---|---|
| المؤلفون: | Borrel, Julien, Gauthier, Alexis, Deprat, Fabien, Lu, Vincent, Abbate, Francesco, Joblot, Sylvain, Clement, Laurent-Renaud, Tupin, Heloise, Zou, Wei, Arevalo, Edwin, Chevalier, Pascal, Dutartre, Didier |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :29-32 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538668283 9781538668290 9781538668276 |
|---|---|
| DOI: | 10.1109/IIT.2018.8807965 |