التفاصيل البيبلوغرافية
العنوان: |
Microprobe with 3D Orthogonal Kinematics for Dimensional Measurement of Industrial Microparts |
المؤلفون: |
Metz, David, Jantzen, Stephan, Stein, Martin, Kniel, Karin, Dietzel, Andreas |
المصدر: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :2134-2137 Jun, 2019 |
Relation: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
قاعدة البيانات: |
IEEE Xplore Digital Library |