Microprobe with 3D Orthogonal Kinematics for Dimensional Measurement of Industrial Microparts

التفاصيل البيبلوغرافية
العنوان: Microprobe with 3D Orthogonal Kinematics for Dimensional Measurement of Industrial Microparts
المؤلفون: Metz, David, Jantzen, Stephan, Stein, Martin, Kniel, Karin, Dietzel, Andreas
المصدر: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :2134-2137 Jun, 2019
Relation: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
قاعدة البيانات: IEEE Xplore Digital Library