Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching

التفاصيل البيبلوغرافية
العنوان: Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching
المؤلفون: Xing, Yan, Guo, Zhiyue, Wu, Guorong, Gosalvez, Miguel A.
المصدر: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :281-284 Jun, 2019
Relation: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538681046
تدمد:21670021
DOI:10.1109/TRANSDUCERS.2019.8808344