High Withstand Voltage Pressure Sensors Based on Silicon Strain Gauges-on-a-Glass Substrate

التفاصيل البيبلوغرافية
العنوان: High Withstand Voltage Pressure Sensors Based on Silicon Strain Gauges-on-a-Glass Substrate
المؤلفون: Kim, Joon Hyub, Bum Kim, Ki, Lee, Sang Ki, Ki Min, Nam, Park, Chan won
المصدر: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :1997-2000 Jun, 2019
Relation: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538681046
تدمد:21670021
DOI:10.1109/TRANSDUCERS.2019.8808348