التفاصيل البيبلوغرافية
| العنوان: |
Highly Reliable Piezoelectric Process Technology in Volume Foundry for Emerging Mems Applications |
| المؤلفون: |
Shih, Victor, Cheng, Sean, Lin, You-Ru, Lin, Anderson, Liao, Yan-Jie, Lin, Ching-Hui, Huang, Fu-Chun, Tai, Kelvin, Hu, Fan, Tsai, Yi-Heng, Chen, Yen-Wen, Chang, Kai-Fung, Chiu, Ching-Hua, Tsai, Leo, Teng, Vincent, Chen, Chih-Ming, Yu, Terrence, Tu, Yeur-Luen, Tseng, Lee-Chuan, Lee, Julian, Chen, Benior, Huang, Shih-Fen, Kalnitsky, Alexander |
| المصدر: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :190-193 Jun, 2019 |
| Relation: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
