مؤتمر
An Ultra-High Resolution Resonant MEMS Accelerometer
| العنوان: | An Ultra-High Resolution Resonant MEMS Accelerometer |
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| المؤلفون: | Pandit, Milind, Mustafazade, Arif, Zhao, Chun, Sobreviela, Guillermo, Zou, Xudong, Steinmann, Philipp, Seshia, Ashwin |
| المصدر: | 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2019 IEEE 32nd International Conference on. :664-667 Jan, 2019 |
| Relation: | 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728116105 9781728116099 |
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| تدمد: | 21601968 |
| DOI: | 10.1109/MEMSYS.2019.8870734 |