Nanoscopic evaluation of semiconductor properties by scanning probe microscopies

التفاصيل البيبلوغرافية
العنوان: Nanoscopic evaluation of semiconductor properties by scanning probe microscopies
المؤلفون: Balk, L.J., Heiderhoff, R., Koschinki, P., Maywald, M.
المصدر: Proceedings of the 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on. :1767-1774 1996
Relation: Proceedings of the 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780333691
9780780333697
DOI:10.1109/ESREF.1996.888212