مؤتمر
Electrode Shape Optimization of Electrostatic Chuck for Uniform Force Distribution using Continuum Sensitivity Analysis
| العنوان: | Electrode Shape Optimization of Electrostatic Chuck for Uniform Force Distribution using Continuum Sensitivity Analysis |
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| المؤلفون: | Park, Jong Oh, Young Choi, Chan, Lee, Jun Seong, Geon Hong, Seung, Park, IL Han |
| المصدر: | 2019 22nd International Conference on Electrical Machines and Systems (ICEMS) Electrical Machines and Systems (ICEMS), 2019 22nd International Conference on. :1-5 Aug, 2019 |
| Relation: | 2019 22nd International Conference on Electrical Machines and Systems (ICEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728133980 9781728133973 |
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| تدمد: | 26425513 |
| DOI: | 10.1109/ICEMS.2019.8922034 |