مؤتمر
Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
| العنوان: | Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements |
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| المؤلفون: | Clement, Marta, Felmetsger, Valeriy, Olivares, Jimena, Mirea, Teona, Sangrador, Jesus |
| المصدر: | 2019 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2019 IEEE International. :720-723 Oct, 2019 |
| Relation: | 2019 IEEE International Ultrasonics Symposium (IUS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728145969 9781728145952 |
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| تدمد: | 19485727 |
| DOI: | 10.1109/ULTSYM.2019.8926266 |