Study of Charge Neutralization Techniques to Prevent Copper Corrosion On Post-FIB Wet Stained Sample

التفاصيل البيبلوغرافية
العنوان: Study of Charge Neutralization Techniques to Prevent Copper Corrosion On Post-FIB Wet Stained Sample
المؤلفون: Lee, Sharon, Hong, Li Li, Ley Hong, Khoo, Chuan, Ang Poh, Zhi Qiang, Mo
المصدر: 2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2019 IEEE 26th International Symposium on. :1-4 Jul, 2019
Relation: 2019 IEEE 26th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728135526
تدمد:19461550
DOI:10.1109/IPFA47161.2019.8984758