Imaging, Modeling and Engineering of Strain in Gate-All-Around Nanosheet Transitors

التفاصيل البيبلوغرافية
العنوان: Imaging, Modeling and Engineering of Strain in Gate-All-Around Nanosheet Transitors
المؤلفون: Reboh, S., Coquand, R., Loubet, N., Bernier, N., Augendre, E., Chao, R., Li, J., Zhang, J., Muthinti, R., Boureau, V., Yamashita, T., Faynot, O.
المصدر: 2019 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2019 IEEE International. :11.5.1-11.5.4 Dec, 2019
Relation: 2019 IEEE International Electron Devices Meeting (IEDM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728140322
تدمد:2156017X
DOI:10.1109/IEDM19573.2019.8993524