Advanced Chemical Concentration Control for Fabrication of Devices Using SiC

التفاصيل البيبلوغرافية
العنوان: Advanced Chemical Concentration Control for Fabrication of Devices Using SiC
المؤلفون: Boecker, J., Kashkoush, I., Waugh, D.
المصدر: 2019 16th China International Forum on Solid State Lighting & 2019 International Forum on Wide Bandgap Semiconductors China (SSLChina: IFWS) Wide Bandgap Semiconductors China (SSLChina: IFWS), 2019 16th China International Forum on Solid State Lighting & 2019 International Forum on. :1-3 Nov, 2019
Relation: 2019 16th China International Forum on Solid State Lighting & 2019 International Forum on Wide Bandgap Semiconductors China (SSLChina: IFWS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728157566
DOI:10.1109/SSLChinaIFWS49075.2019.9019782