Optimization of short channel effect by arsenic P-Halo implant through polysilicon gate for 0.12 um P-MOSFET

التفاصيل البيبلوغرافية
العنوان: Optimization of short channel effect by arsenic P-Halo implant through polysilicon gate for 0.12 um P-MOSFET
المؤلفون: Chen, C., Chang, C.Y., Chou, J.W., Huang, C.T., Lin, K.C., Yao-Chin Cheng, Chih-Yung Lin
المصدر: Proceedings 2000 IEEE Hong Kong Electron Devices Meeting (Cat. No.00TH8503) Electron devices meeting - Hong Kong Electron Devices Meeting, 2000. Proceedings. 2000 IEEE Hong Kong. :44-47 2000
Relation: Proceedings 2000 IEEE Hong Kong Electron Devices Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780363043
9780780363045
DOI:10.1109/HKEDM.2000.904212