A 0.11 /spl mu/m CMOS technology with copper and very-low-k interconnects for high-performance system-on-a-chip cores

التفاصيل البيبلوغرافية
العنوان: A 0.11 /spl mu/m CMOS technology with copper and very-low-k interconnects for high-performance system-on-a-chip cores
المؤلفون: Takao, Y., Kudo, H., Mitani, J., Kotani, Y., Yamaguchi, S., Yoshie, K., Kawano, M., Nagano, T., Yamamura, I., Uematsu, M., Nagashima, N., Kadomura, S.
المصدر: International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) Electron devices meeting Electron Devices Meeting, 2000. IEDM '00. Technical Digest. International. :559-562 2000
Relation: International Electron Devices Meeting. Technical Digest. IEDM
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780364384
9780780364387
DOI:10.1109/IEDM.2000.904381