MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane

التفاصيل البيبلوغرافية
العنوان: MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane
المؤلفون: Tang, Yongkui, Liu, Song, Kim, Eun Sok
المصدر: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :58-61 Jan, 2020
Relation: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728135816
9781728135809
تدمد:21601968
DOI:10.1109/MEMS46641.2020.9056313