مؤتمر
MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane
العنوان: | MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane |
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المؤلفون: | Tang, Yongkui, Liu, Song, Kim, Eun Sok |
المصدر: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :58-61 Jan, 2020 |
Relation: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781728135816 9781728135809 |
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تدمد: | 21601968 |
DOI: | 10.1109/MEMS46641.2020.9056313 |