مؤتمر
Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing
| العنوان: | Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing |
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| المؤلفون: | Chellasivalingam, Malar, Graves, Brian, Boies, Adam, Seshia, Ashwin A. |
| المصدر: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :761-764 Jan, 2020 |
| Relation: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728135816 9781728135809 |
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| تدمد: | 21601968 |
| DOI: | 10.1109/MEMS46641.2020.9056426 |