A Magnetic-Polymer-Based Passive Pressure Sensor Realized with a Foldable Parylene Substrate

التفاصيل البيبلوغرافية
العنوان: A Magnetic-Polymer-Based Passive Pressure Sensor Realized with a Foldable Parylene Substrate
المؤلفون: Lin, Yung-Chih, Yang, Yao-Joe
المصدر: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :669-672 Jan, 2020
Relation: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728135816
9781728135809
تدمد:21601968
DOI:10.1109/MEMS46641.2020.9056440