Over-the-top Si Interposer Embedding Backside Buried Metal PDN to Reduce Power Supply Impedance of Large Scale Digital ICs

التفاصيل البيبلوغرافية
العنوان: Over-the-top Si Interposer Embedding Backside Buried Metal PDN to Reduce Power Supply Impedance of Large Scale Digital ICs
المؤلفون: Miki, Takuji, Nagata, Makoto, Tsukioka, Akihiro, Miura, Noriyuki, Okidono, Takaaki, Araga, Yuuki, Watanabe, Naoya, Shimamoto, Haruo, Kikuchi, Katsuya
المصدر: 2019 International 3D Systems Integration Conference (3DIC) 3D Systems Integration Conference (3DIC), 2019 International. :1-4 Oct, 2019
Relation: 2019 International 3D Systems Integration Conference (3DIC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728148700
DOI:10.1109/3DIC48104.2019.9058860