Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

التفاصيل البيبلوغرافية
العنوان: Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine
المؤلفون: Buchoux, Anthony, Agrawal, Prashant, Wells, Garry G., Ledesma-Aguilar, Rodrigo, Walton, Anthony J., Terry, Jonathan G., Mchale, Glen, Sefiane, Khellil, Stokes, Adam A.
المصدر: 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2020 IEEE 33rd International Conference on. :1-6 May, 2020
Relation: 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728140087
تدمد:21581029
DOI:10.1109/ICMTS48187.2020.9107902