Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel’s 10+ Process

التفاصيل البيبلوغرافية
العنوان: Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel’s 10+ Process
المؤلفون: Lin, C.-Y., Avci, U. E., Blount, M. A., Grover, R., Hicks, J., Kasim, R., Kundu, A., Pelto, C. M., Ryder, C., Schmitz, A., Sethi, K., Seghete, D., Towner, D. J., Welsh, A. J., Weber, J., Auth, C.
المصدر: 2020 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2020 IEEE International. :1-4 Apr, 2020
Relation: 2020 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728131993
تدمد:19381891
DOI:10.1109/IRPS45951.2020.9128312