دورية أكاديمية
High reliability polyoxide fabricated by using TEOS oxide deposited on disilane polysilicon film
| العنوان: | High reliability polyoxide fabricated by using TEOS oxide deposited on disilane polysilicon film |
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| المؤلفون: | Jam Wem Lee, Chung-Len Lee, Tan Fu Lei, Chao Sung Lai |
| المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 48(4):743-749 Apr, 2001 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00189383 15579646 |
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| DOI: | 10.1109/16.915716 |