التفاصيل البيبلوغرافية
| العنوان: |
Novel overlay correction by synchronizing scan speed to intra-die fingerprint on lithography scanner |
| المؤلفون: |
Hamasaki, Masakazu, Hagio, Yoshinori, Kasa, Kentaro, Kato, Yoshimitsu, Takakuwa, Manabu, Obata, Tsutomu, Nakao, Shunichi, Miyake, Manabu, Kato, Katsuya, Takahata, Yosuke, Nakae, Akihiro |
| المصدر: |
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020 31st Annual. :1-6 Aug, 2020 |
| Relation: |
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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