التفاصيل البيبلوغرافية
العنوان: |
Impact of Asymmetric Memory Hole Profile on Silicon Selective Epitaxial Growth in 3D NAND Memory : AEPM: Advanced Equipment Processes and Materials |
المؤلفون: |
Chang, Yao-Yuan, Yang, Zusing, Wu, Ming-Tsung, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan |
المصدر: |
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020 31st Annual. :1-4 Aug, 2020 |
Relation: |
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |