Microfabrication Challenges for Silicon-based Large Area (>500 mm2) 3D-manifolded Embedded Microcooler Devices for High Heat Flux Removal

التفاصيل البيبلوغرافية
العنوان: Microfabrication Challenges for Silicon-based Large Area (>500 mm2) 3D-manifolded Embedded Microcooler Devices for High Heat Flux Removal
المؤلفون: Hazra, Sougata, Piazza, Alisha, Jung, Ki Wook, Asheghi, Mehdi, Gupta, Man Prakash, Jih, Edward, Degner, Mike, Goodson, Kenneth E.
المصدر: 2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), 2020 19th IEEE Intersociety Conference on. :83-90 Jul, 2020
Relation: 2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728197647
9781728197630
تدمد:25770799
DOI:10.1109/ITherm45881.2020.9190541