دورية أكاديمية
Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process
العنوان: | Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process |
---|---|
المؤلفون: | Sung, J., Kim, S., Han, B., Kim, Y., Kim, H. |
المصدر: | IEEE Transactions on Industry Applications IEEE Trans. on Ind. Applicat. Industry Applications, IEEE Transactions on. 56(6):7012-7019 Jan, 2020 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00939994 19399367 |
---|---|
DOI: | 10.1109/TIA.2020.3023670 |