دورية أكاديمية
Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process
| العنوان: | Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process |
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| المؤلفون: | Sung, J., Kim, S., Han, B., Kim, Y., Kim, H. |
| المصدر: | IEEE Transactions on Industry Applications IEEE Trans. on Ind. Applicat. Industry Applications, IEEE Transactions on. 56(6):7012-7019 Jan, 2020 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00939994 19399367 |
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| DOI: | 10.1109/TIA.2020.3023670 |