دورية أكاديمية
CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures
| العنوان: | CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures |
|---|---|
| المؤلفون: | Nagamura, Y., Ide, T., Arai, M., Fukumoto, S. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 33(4):597-605 Nov, 2020 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
|---|---|
| DOI: | 10.1109/TSM.2020.3029049 |