مؤتمر
The Hitachi advanced implanter UI-6000 for SIMOX wafer production
| العنوان: | The Hitachi advanced implanter UI-6000 for SIMOX wafer production |
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| المؤلفون: | Tokiguchi, K., Seki, T., Itou, J., Kitazawa, S., Sato, T., Mera, K., Hashimoto, I., Yoshikawa, A. |
| المصدر: | 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) Ion implantation technology Ion Implantation Technology, 2000. Conference on. :372-375 2000 |
| Relation: | 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780364627 9780780364622 |
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| DOI: | 10.1109/IIT.2000.924165 |