مؤتمر
Deterioration in the piezoelectric property of ScAlN thin films by negative ion bombardment increased in low-pressure sputtering deposition
| العنوان: | Deterioration in the piezoelectric property of ScAlN thin films by negative ion bombardment increased in low-pressure sputtering deposition |
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| المؤلفون: | Tominaga, Takumi, Takayanagi, Shinji, Yanagitani, Takahiko |
| المصدر: | 2020 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS),2020 IEEE International. :1-4 Sep, 2020 |
| Relation: | 2020 IEEE International Ultrasonics Symposium (IUS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728154480 |
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| تدمد: | 19485727 |
| DOI: | 10.1109/IUS46767.2020.9251438 |