Analysis of the Effects of Boron Transient Enhanced Diffusion on Threshold Voltage Mismatch in Steep Retrograde Doping NMOSFETs with Inserted Oxygen Layers

التفاصيل البيبلوغرافية
العنوان: Analysis of the Effects of Boron Transient Enhanced Diffusion on Threshold Voltage Mismatch in Steep Retrograde Doping NMOSFETs with Inserted Oxygen Layers
المؤلفون: Fujii, Shuntaro, Takeuchi, Hideki, Morita, Soichi, Yagi, Tatsushi, Hamada, Shohei, Sakamoto, Toshiro, Kawaguchi, Shinji, Ishigami, Naoki, Okamoto, Atsushi, Ikeda, Shuji, Wong, Hiu-Yung, Mears, Robert J., Miyazaki, Tsutomu
المصدر: 2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2020 IEEE International Symposium on the. :1-4 Jul, 2020
Relation: 2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728161693
تدمد:19461550
DOI:10.1109/IPFA49335.2020.9260584