Influence of N2 ratio in Hydrogen/Nitrogen Plasma on Titanium dioxide/Aluminum doped Zinc Oxide Bilayer Films Applied for Multifunctional Energy-saving Glass

التفاصيل البيبلوغرافية
العنوان: Influence of N2 ratio in Hydrogen/Nitrogen Plasma on Titanium dioxide/Aluminum doped Zinc Oxide Bilayer Films Applied for Multifunctional Energy-saving Glass
المؤلفون: Chan, Huang-Tian, Lin, Cheng-Yi, Chang, Shang-Chou
المصدر: 2020 15th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2020 15th International. :1-4 Oct, 2020
Relation: 2020 15th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728198514
تدمد:21505942
DOI:10.1109/IMPACT50485.2020.9268599