Test structure and method for capacitance extraction in multi-conductor systems

التفاصيل البيبلوغرافية
العنوان: Test structure and method for capacitance extraction in multi-conductor systems
المؤلفون: Ward, B., Bordelon, J., Prior, S., Tranchina, B., Jiann Liu
المصدر: ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) Microelectronic test structures Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on. :189-193 2001
Relation: ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780365119
9780780365117
DOI:10.1109/ICMTS.2001.928660