مؤتمر
Optimization of etching and stripping chemistries for Z3MS/sup TM/ Low-k
| العنوان: | Optimization of etching and stripping chemistries for Z3MS/sup TM/ Low-k |
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| المؤلفون: | Lepage, M., Shamiryan, D., Baklanov, M., Struyf, H., Mannaert, G., Vanhaelemeersch, S., Weidner, K., Meynen, H. |
| المصدر: | Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :174-176 2001 |
| Relation: | Proceedings of the IEEE 2001 International Interconnect Technology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780366786 9780780366787 |
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| DOI: | 10.1109/IITC.2001.930051 |