مؤتمر
Wet or plasma clean? Competing or complementary? A dual damascene study with Si-OC-H dielectric on copper wiring
| العنوان: | Wet or plasma clean? Competing or complementary? A dual damascene study with Si-OC-H dielectric on copper wiring |
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| المؤلفون: | Louis, D., Assous, M., Blanc, R., Brun, P., Arvet, C., Lajoinie, E., Holmes, D. |
| المصدر: | Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :289-291 2001 |
| Relation: | Proceedings of the IEEE 2001 International Interconnect Technology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780366786 9780780366787 |
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| DOI: | 10.1109/IITC.2001.930086 |