دورية أكاديمية
The investigation of key technologies for sub-0.1-/spl mu/m CMOS device fabrication
العنوان: | The investigation of key technologies for sub-0.1-/spl mu/m CMOS device fabrication |
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المؤلفون: | Qiuxia Xu, He Qian, Huaxiang Yin, Lin Jia, Honghao Ji, Baoqing Chen, Yajiang Zhu, Min Liu, Zhensheng Han, Huanzhang Hu, Yulin Qiu, Dexin Wu |
المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 48(7):1412-1420 Jul, 2001 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189383 15579646 |
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DOI: | 10.1109/16.930660 |