Scaling variance, invariance and prediction of design rule: from 0.25-/spl mu/m to 0.10-/spl mu/m nodes in the era of foundry manufacturing

التفاصيل البيبلوغرافية
العنوان: Scaling variance, invariance and prediction of design rule: from 0.25-/spl mu/m to 0.10-/spl mu/m nodes in the era of foundry manufacturing
المؤلفون: Doong, K.Y.-Y., Ting, J.K., Sunnys Hsieh, Lin, S.C., Binson Shen, Guo, J.C., Young, K.L., Chen, I.C., Sun, J.Y.C., Wang, J.K.
المصدر: 2001 6th International Workshop on Statistical Methodology (Cat. No.01TH8550) Statistical methodology Statistical Methodology, IEEE International Workshop on, 2001 6yh.. :38-42 2001
Relation: 2001 6th International Workshop on Statistical Methodology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780366883
9780780366886
DOI:10.1109/IWSTM.2001.933822