مؤتمر
Thermally stable ultra-thin Zr silicate for CMOS applications
| العنوان: | Thermally stable ultra-thin Zr silicate for CMOS applications |
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| المؤلفون: | Luo, Z.J., Ma, T.P., Cartier, E., Copel, M., Tamagawa, T., Halpern, B. |
| المصدر: | 2001 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers (Cat. No.01TH8517) VLSI technology, systems, and applications VLSI Technology, Systems, and Applications, 2001. Proceedings of Technical Papers. 2001 International Symposium on. :200-203 2001 |
| Relation: | 2001 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780364120 9780780364127 |
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| تدمد: | 1524766X |
| DOI: | 10.1109/VTSA.2001.934519 |