التفاصيل البيبلوغرافية
| العنوان: |
Design of Piezoelectric MEMS Bulk Acoustic Wave Mode-Matched Gyroscopes Based on Support Transducer |
| المؤلفون: |
Nguyen, Ngoc Minh, Chang, Chin-Yu, Pillai, Gayathri, Li, Sheng-Shian |
| المصدر: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :338-341 Jan, 2021 |
| Relation: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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