التفاصيل البيبلوغرافية
العنوان: |
Design of Piezoelectric MEMS Bulk Acoustic Wave Mode-Matched Gyroscopes Based on Support Transducer |
المؤلفون: |
Nguyen, Ngoc Minh, Chang, Chin-Yu, Pillai, Gayathri, Li, Sheng-Shian |
المصدر: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :338-341 Jan, 2021 |
Relation: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |