Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction

التفاصيل البيبلوغرافية
العنوان: Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction
المؤلفون: Miani, Theo, Verdot, Thierry, Berthelot, Audrey, Maspero, Federico, Koumela, Alexandra, Robert, Philippe, Langfelder, Giacomo, Arcamone, Julien, Sansa, Marc
المصدر: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :192-195 Jan, 2021
Relation: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665419123
تدمد:21601968
DOI:10.1109/MEMS51782.2021.9375287